Damien BAZIN, Mickael GEZAT, Michel ROBERT and Franck AMIET
To ensure people safety and a good repeatability of industrial process, the analysis of ambient air is crucial. Especially, electronic boards are produced in clean air room by complex lithographic process using very reactive chemicals. The nature and concentration of volatile compounds can be different depending on the chemical process and can also vary rapidly. There is a need to analyze precisely and continuously gas process in air with an instrument designed for industrial use.
Since 1986, Chromatotec® is a worldwide recognised expert in gas
analysis, renowned and certified for its precise analysis in ambient air
monitoring and natural gas.[1]
In industry, Chromatotec’s systems prove their value in online
monitoring, quality control and environmental protection. They make
substantial contributions to process control, to the improvement of
product quality, and to the enhancement of system safety as well as to
environmental protection. Chromatotec has developed a turnkey solution
which allows the quantification and identification of compounds at ppt,
ppb, ppm and % levels. The airmoTWA is a new industry standard for
online and continuous TRAP-GC-MS-FID. It encompasses a specific trap to
concentrate the sample, a column for separation of chemicals and two
detectors : a new micro flame ionization detector (FID) and a mass
spectrometer for quantification and identification respectively. The
airmoTWA is simple to use and incredibly sensitive and delivers robust
and reliable performance. Particularly, the instrument can monitor high
and low concentrations for a large number of molecules. The instrument
is measuring and recording concentrations of chemicals and can have
alarm systems which can be set to inform on important changes of the
surrounding atmosphere. We will show that the instrument is perfectly
suited for the mapping of chemical concentrations in clean air room,
leak detection and filters efficiency.
[1] Tests published in 2013 by the NPL on 12 VOCs compounds